Suspension and Measurement of Graphene and Bi2Se3 Atomic Membranes

Jairo Velasco Jr., Zeng Zhao, Hang Zhang, Fenglin Wang, Zhiyong Wang, Philip Kratz, Lei Jing, Wenzhong Bao, Jing Shi, Chun Ning Lau

Published 2010-11-12Version 1

Coupling high quality, suspended atomic membranes to specialized electrodes enables investigation of many novel phenomena, such as spin or Cooper pair transport in these two dimensional systems. However, many electrode materials are not stable in acids that are used to dissolve underlying substrates. Here we present a versatile and powerful multi-level lithographical technique to suspend atomic membranes, which can be applied to the vast majority of substrate, membrane and electrode materials. Using this technique, we fabricated suspended graphene devices with Al electrodes and mobility of 5500 cm^2/Vs. We also demonstrate, for the first time, fabrication and measurement of a free-standing thin Bi2Se3 membrane, which has low contact resistance to electrodes and a mobility of >~500 cm^2/Vs.