A bubble-powered micro-rotor: conception, manufacturing, assembly, and characterization

Jonathan Kao, Xiaolin Wang, John Warren, Jie Xu, Daniel Attinger

Published 2009-12-15Version 1

A steady fluid flow, called microstreaming, can be generated in the vicinity of a micro-bubble excited by ultrasound. In this article, we use this phenomenon to assemble and power a microfabricated rotor at rotation speeds as high as 625 rpm. The extractible power is estimated to be on the order of a few femtowatts. A first series of experiments with uncontrolled rotor shapes is presented, demonstrating the possibility of this novel actuation scheme. A second series of experiments with 65 micron rotors micromanufactured in SU-8 resin are presented. Variables controlling the rotation speed and rotor stability are investigated, such as the bubble diameter, the acoustic excitation frequency and amplitude, and the rotor geometry. Finally, an outlook is provided on developing this micro-rotor into a MEMS-based motor capable of delivering tunable, infinitesimal rotary power at the microscale.