{
  "id": "1007.0240",
  "version": "v2",
  "published": "2010-07-01T19:38:12.000Z",
  "updated": "2010-07-03T00:03:32.000Z",
  "title": "Chip-scale nanofabrication of single spins and spin arrays in diamond",
  "authors": [
    "David M. Toyli",
    "Christoph D. Weis",
    "Gregory D. Fuchs",
    "Thomas Schenkel",
    "David D. Awschalom"
  ],
  "comment": "This paper has been withdrawn by the authors. 14 pages, 3 figures; Posting has been removed due to editorial request from ACS Nano Letters; This version has been removed by arXiv admin because it contains an inappropriate withdrawal notice",
  "journal": "Nano Lett., Article ASAP (2010)",
  "doi": "10.1021/nl102066q",
  "categories": [
    "cond-mat.mes-hall",
    "cond-mat.mtrl-sci",
    "quant-ph"
  ],
  "abstract": "We demonstrate a technique to nanofabricate nitrogen vacancy (NV) centers in diamond based on broad-beam nitrogen implantation through apertures in electron beam lithography resist. This method enables high-throughput nanofabrication of single NV centers on sub-100 nm length scales. Secondary ion mass spectroscopy (SIMS) measurements facilitate depth profiling of the implanted nitrogen to provide three-dimensional characterization of the NV center spatial distribution. Measurements of NV center coherence with on-chip coplanar waveguides suggest a pathway for incorporating this scalable nanofabrication technique in future quantum applications.",
  "revisions": [
    {
      "version": "v2",
      "updated": "2010-07-03T00:03:32.000Z"
    }
  ],
  "analyses": {
    "keywords": [
      "single spins",
      "spin arrays",
      "chip-scale nanofabrication",
      "electron beam lithography resist",
      "method enables high-throughput nanofabrication"
    ],
    "tags": [
      "journal article"
    ],
    "publication": {
      "journal": "Nano Letters",
      "year": 2010,
      "month": "Aug",
      "volume": 10,
      "number": 8,
      "pages": 3168
    },
    "note": {
      "typesetting": "TeX",
      "pages": 14,
      "language": "en",
      "license": "arXiv",
      "status": "editable",
      "adsabs": "2010NanoL..10.3168T"
    }
  }
}